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[Microphone]震膜鼓泡断裂监测,硅麦实时动态表面形貌 [复制链接]

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只看楼主 倒序阅读 使用道具 楼主   发表于: 2017-11-06


MEMS Microphone

A MEMS microphone is composed by a diaphragm vibrating between two holed back-plates. Measurement of topography and vibration modes of each of them are challenging :
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  • The diaphragm has a one millimeter diameter and has to be measured through the grid of 7 microns diameter holes of the back-plate.
  • The 1 micrometer thin back-plate silicon membranes is transparent for visible and near IR illumination. It is a source of measurement artifacts due to multiple reflection through and by the plates.


MEMS microphone : Diaphragm ⌀1mm, lateral resolution 0.5 µm               Crop : detail of ⌀7 µm back-plate holes


Stitched up measurement in stroboscopic mode

Stitching algorithms enable to combine multiple individual measurements to produce a high lateral resolution topography map of the microphone over its complete surface. It enables diaphragm characterization through the back-plate holes.
Combining stitching with stroboscopic synchronization acquisition provides a time sequence of both the diaphragm and the back-plates topographies along the excitation period of the microphone. Complete vibration analysis of each of them can be performed.
Movie:
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  • Field of view : 1 x 1 mm
  • Lateral resolution : 0.5 μm
  • 32 topographies are recorded along the excitation period
  • 10×10 stitching : each topography measurement has a super high resolution of 30 Mpx

    UV laser source


    The thin silicon back-plate membranes is totally reflective using a DHM® operating with UV light sources. It prevents from any measurement artifact observed using blue, green, red or NIR wavelengths.Thin silicon membrane (<1 μm)

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