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[Microstereolitho]微传感器 MEMS与智能器件Microsensors, MEMS and Smart Devices [复制链接]

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离线Admin_MEMS
 

只看楼主 倒序阅读 使用道具 楼主   发表于: 2010-10-18
— 本帖被 Admin_MEMS 执行置顶操作(2010-10-18) —
Description:
Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle.
Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices.


Features include:
* Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods.


* Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines.


* Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin.


* An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology.


* Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field.


Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.



Introduction:
Electronic Materials and Processing

MEMS Materials and their Preparation

Standard Microelectronic Technologies

Silicon Micromachining:Bulk

Silicon Micromachining: Surface

Microstereolithography for MEMS

Microsensors

Introduction to SAW Devices

Surface Acoustic Waves in Solids

IDT Microsensor Parameter Measurement

IDT Microsensor Fabrication

IDT Microsensors

MEMS-IDT Microsensors

Smart Sensors and MEMS

Appendices

Index

希望更多的人喜欢MEMS技术天地
离线Admin_MEMS

只看该作者 沙发   发表于: 2010-10-18
希望更多的人喜欢MEMS技术天地
离线riikkaxr
只看该作者 板凳   发表于: 2010-11-22
hehe, hehe
离线戊戌饼干
只看该作者 地板   发表于: 2011-05-06
佩服你,能发这么好的帖子,厉害
离线xlsprb

只看该作者 4楼  发表于: 2012-02-09
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离线cvfbac

只看该作者 5楼  发表于: 2012-02-17
非常感谢您!
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只看该作者 6楼  发表于: 2013-05-09
好贴,双手赞成!
离线优卿颖p

只看该作者 7楼  发表于: 2013-11-26
楼上的稍等啦
离线真是如此

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   路过 看看。
离线pangdudu

只看该作者 9楼  发表于: 2014-03-21
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